XRF - X-ray fluorescence is a non-destructive method to determine the qualitative and quantitative elemental composition of a sample. In 2D a mapping of trace elements (heavier than Si) in sub-ppm level is possible in µm-dimension.
Scientific applications are amongst others the detection of toxic elements in environmental samples, the test of pure materials for contaminations and the analysis of precious sample from art or archeology.
With a confocal X-ray fluorescence microprobe the mapping of the 3D elemental distribution on a µm scale with elemental maps at different depth levels below the surface with a depth resolution of about 10-20 μm is possible.
This method is used for analyzing the distribution of metals in bones.