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LIGA - X-ray lithography and Electroplating

X-ray LIGA with unique selling points
  • Large structure heights (until 2300 µm)
  • High aspect ratio
  • High precision / excellent reproducibility
  • Finest details of contours
  • Smooth sidewalls

Logo Mikroworks

Typical parameters of X-ray LIGA structures
  • Highest precision over large range of structure heights
10 - 2000 μm
  • Reproducibility
Cp (T = 2 µm) = 2.1,

Sigma = 0.16 µm
  • Extreme verticality for finest details and extreme fitting requirements
0.1 μm / 100 μm (Resist)

0.3 µm / 100 µm (Metal)

 LIGA Structure             LIGA vertical X                                  

 

Absorption gratings for phase contrast imaging
  • Energy range 10 keV to 100 keV
  • 2x10 cm² area possible

LIGA absorption grating     LIGA grating 2

 

Watch parts in hard gold alloy
Development of a LIGA-compatible gold alloy:
  • Hardness > 160 Hv, improved version 350 Hv
  • Colour 2-3 N
  • Gold-Grade > 23 Karat and > 16 Karat bei 350 Hv

LIGA Clock parts in gold     clock with parts of LIGA gold fabrication

Finger pattern nickel
  • 1500 µm high
  • Top side polished
  • Smallest metal width 12 µm
  • Smallest gap 5 to 8 µm
LIGA finger pattern nickel